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Tag: Belgian electronics

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ASML, imec set up new high-NA optics lab for EUV lithography

October 23, 2018

Via: Optics.org

Engineers at the Belgian electronics research center imec and lithography equipment giant ASML are establishing a new laboratory to accelerate the development of next-generation extreme ultraviolet (EUV) optics for patterning semiconductor chips. Part of a wider collaboration between the two […]

Tag: Belgian electronics

ASML, imec set up new high-NA optics lab for EUV lithography

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ASML, imec set up new high-NA optics lab for EUV lithography

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Latest Publications

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