Tag: EUV


ASML, imec set up new high-NA optics lab for EUV lithography

October 23, 2018


Engineers at the Belgian electronics research center imec and lithography equipment giant ASML are establishing a new laboratory to accelerate the development of next-generation extreme ultraviolet (EUV) optics for patterning semiconductor chips. Part of a wider collaboration between the two […]


Profits surge at Trumpf

October 18, 2018


Industrial laser and machine tool company Trumpf has reported a sharp increase in profits in its latest financial year, thanks in large part to burgeoning demand for the ultra-high-power lasers it provides for extreme ultraviolet (EUV) lithography systems. The Ditzingen-headquartered […]